摘要
由于金属－半导作－金属光电探测器（ＭＳＭ－ＰＤ）潜在的优点，用于光通信、高速片到片互连，以及光控受到极大关注。文中介绍这种光探测器及其与放大器单片集成的最新进展。
The metal-semiconductor-metal photodetector (MSM-PD) has received great attention for aplication in optical communication, high-speed chip-to-chipoptical connection and optical control, due to its potential advantages. Progress in this photodetector and its monolithic integration with amplifier is reported in this paper.
出处
《半导体光电》
CAS
CSCD
北大核心
1994年第3期209-216,共8页
Semiconductor Optoelectronics
