摘要
薄膜在损伤前后的图像中各象素灰度级变化很大,通过判定激光辐照前后两幅图像的相似程度可以比较客观地判别薄膜的损伤情况。选用基于差异图像直方图的相似性测度来判定两幅图像的相似程度,进而达到识别损伤的目的。实验证明,该方法不仅能识别重度损伤,而且对显微镜不易观察的损伤也能做到准确地识别。耗时短、精度高,可以在损伤阈值测试实验中对薄膜损伤进行在线实时检测。
The gray scale of every pixel in image is different before and after damage,.we may distinguish the damage of film objectively by determining similarity degree of two images before laser irradiation and after irradiation. According to similarity estimation of discrepancy image histogram may determine two images＇ similarity degree, in order to recognize film damage. Experiment illustration, we can not only recognize heavy damage but also recognize light damage accurately by this method. This method has shorter disposal time and high precision, and on - line real time film laser damage detection in the test of laser damage threshold.
出处
《激光杂志》
CAS
CSCD
北大核心
2007年第1期60-61,共2页
Laser Journal
关键词
薄膜
激光损伤
灰度直方图
图像相似
Thin film
laser damage
gray histogram
image similarity
