摘要
采用 sol-gel 方法制备 SrTiO_3陶瓷粉体,利用 TG-DTA 分析 SrTiO_3干凝胶粉的分解、化合反应,初步确定了SrTiO_3陶瓷预烧和烧结温度,采用 SEM 研究了 SrTiO_3陶瓷的内部结构,重点探讨了不同烧结制度对 SrTiO_3陶瓷介电性能的影响。研究表明,当采用在空气气氛下以 5 ℃/min 的升温速率直接升温至 1 000℃,保温 0.5 h,再降温至 750℃保温 0.5 h 后随炉冷却的烧结工艺,SrTiO_3陶瓷纯度高,致密性好,晶粒粒径小于 100 nm,且具有良好的介电性能,低频下相对介电常数高达 3 000 左右。
SrTiO3 ceramic powders were prepared by sol-gel method, Decomposition and synthesis behaviors of the compound of SrTiO3 dry-gel powders were analyzed by TG-DTA. And calcine and sintering temperature was confirmed initially. Interior structure of SrTiO3 ceramic was studied by SEM. The effects of different sintering systems on dielectric properties of SrTiO3 ceramic were mainly discussed. The results indicate that the high quality, including high purity, good compact degree, its grain size is less than 100 nm, and in low- frequency its dielectric constant can be higher than 3 000 or so. SrTiO3 ceramics which have good dielectric characteristics can be obtained by the sintering system, as follows: sintering temperature is 1 000℃ for 0.5 h, rate of ascending temperature is 5℃/min, directly promoting temperature under air atmosphere, falling temperature system is to cool 750℃ for 0.5 h with furnace cooling, then reducing to the room temperature.
出处
《电子元件与材料》
CAS
CSCD
北大核心
2005年第2期16-19,共4页
Electronic Components And Materials
基金
上海市重点学科建设资助项目
上海微纳科技有限公司资助项目
