摘要
研究了热丝CVD金刚石薄膜的红外反射吸收谱,讨论了金刚石薄膜中H、N等杂质和晶粒晶型、晶粒尺度对膜红外透过率的影响。
Infared reflection and absorption spectra of HFCVD grown diamond thin films have been investigated. The effect of H and N impurities, crystal shape and crystal grain size on the film infrared transmittance is discussed.
出处
《红外技术》
CSCD
1993年第6期18-21,共4页
Infrared Technology
关键词
金钢石薄膜
红外吸收
红外材料
Diamond thin film
Infrared absorption
Impurity absorption
