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Polycrystalline Silicon Gettered by Porous Silicon and Heavy Phosphorous Diffusion 被引量:2

Polycrystalline Silicon Gettered by Porous Silicon and Heavy Phosphorous Diffusion
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摘要 The biggest barrier for photovoltaic (PV) utilization is its high cost, so the key for scale PV utiliza-tion is to further decrease the cost of solar cells. One way to improve the efficiency, and therefore lower the cost, is to increase the minority carrier lifetime by controlling the material defects. The main defects in grain boundaries of polycrystalline silicon gettered by porous silicon and heavy phosphorous diffusion have been studied. The porous silicon was formed on the two surfaces of wafers by chemical etching. Phosphorous was then diffused into the wafers at high temperature (900℃). After the porous silicon and diffusion layers were removed, the minority carrier lifetime was measured by photo-conductor decay. The results show that the lifetime抯 minority carriers are increased greatly after such treatment. The biggest barrier for photovoltaic (PV) utilization is its high cost, so the key for scale PV utiliza-tion is to further decrease the cost of solar cells. One way to improve the efficiency, and therefore lower the cost, is to increase the minority carrier lifetime by controlling the material defects. The main defects in grain boundaries of polycrystalline silicon gettered by porous silicon and heavy phosphorous diffusion have been studied. The porous silicon was formed on the two surfaces of wafers by chemical etching. Phosphorous was then diffused into the wafers at high temperature (900℃). After the porous silicon and diffusion layers were removed, the minority carrier lifetime was measured by photo-conductor decay. The results show that the lifetime抯 minority carriers are increased greatly after such treatment.
出处 《Tsinghua Science and Technology》 SCIE EI CAS 2004年第2期242-245,共4页 清华大学学报(自然科学版(英文版)
关键词 polycrystalline gettering grain boundaries passivation porous silicon heavy phosphorous diffusion polycrystalline gettering grain boundaries passivation porous silicon heavy phosphorous diffusion
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