摘要
介绍了一种以弹性导轨为支承的平面三自由度微动工作台的原理、结构、设计计算方法及闭环控制的基本原理。采用电致伸缩微位移器驱动弹性导轨 ,电涡流传感器测量工作台的微位移 ,能可靠地保证微动工作台的运动精度 ,并使其结构简单、紧凑。
The principle,structure,design and calculating methods on micro displacement worktable with three degrees of freedom supported by elastic guides are presented. The basic principle of close-ring control is also introduced. The electricity-sending flexible micro displacement device is adopted to urge elasticguides and electric whirlpool spread sense device is suggested to measure the displacement of worktable to guarantee the kinematic accuracy of the worktable and make its structure simple and compact.
出处
《工具技术》
北大核心
2004年第4期56-58,共3页
Tool Engineering
基金
国家自然科学基金项目 (项目编号 :5 0 175 0 2 4)
