摘要
TiN系涂层具有高的硬度、耐磨性 ,低的摩擦系数和良好的化学稳定性 ,在工模具上获得广泛的应用。多元多层合金化是强化TiN膜的有效途径之一 ,也是目前研究的热点。本文介绍了几种多元多层TiN薄膜的沉积技术及性能特点 ,并指出了国内TiN涂层的发展趋势。
The TiN coating has been widely employed in tools and dies because of its high hardness, excellent wear resistance, low friction coefficient and well chemical stability. Multi-components and multi-layers are the effective methods to improve the properties of TiN coating, which has been researched widespreadly. The deposition processes and properties of various multicomponents and multilayers TiN coatings are studied, and the developing trend of TiN coating is discussed.
出处
《工具技术》
北大核心
2004年第4期3-8,共6页
Tool Engineering
