摘要
本文分析了离子注入机真空抽气特点，并从实际应用的观点出发建立了一套差压抽 气装置，测定了真空室各部分真空度与差压器气导的关系曲线。也测定了真空度与漏气 量的关系曲线。研究结果表明，合理地采用差压抽气技术就可以有效地降低离子源漏气 对离子注入机真空度造成的不利影响。
In this paper a differential pumping apparatus is set up to analyse the characteristic of vacuum-pumping for the ion implanter. Some relationships between the pressure in various region of the vacuum chamber and. the gas conductance in differential pressure system are measured, and the relationship between the pressure and the leakage in the vacuum apparatus is also measured. Experimental results show that harmful influences caused by the leakage in ion source on the vacuum in the ion implanter can be effectively reduced by reasonable of the differential pumping technique.
出处
《真空》
CAS
北大核心
1992年第4期17-20,48,共5页
Vacuum
