摘要
给出了采用5步法测量白光干涉中零光程差位置的理论推导。提出在测量中以双光束干涉条纹间距的1/4大小作为干涉光强空间采样间隔;以被测点附近5点测量数据作为一组基本数据来确定干涉条纹的局部调制度;采用重心法确定干涉条纹调制度的最大值位置,并以此作为零光程差位置。对不同干涉光强分布公式生成的模拟测量数据进行了理论分析;对光电测量系统中的机械精度与光电测量精度对测量结果的影响进行了定量计算。通过计算得到,本方法的最大零光程位置测量误差不超过1/4干涉光中心波长。
The five-step method for position measurement of zero light path difference in white light interferer system was described. The local modulation of fringes was obtained under the condition of one fourth of interferer fringes period length as the sampling interval and the light intensity at five points be measured nearby as the basic data. The centrobaric method was used to determine the position with the maximum modulation value of fringes and the position was used as the point of zero light path difference. In theory, the analog data derived from different formulae of interfere intensity were analyzed and the effect of mechanical precision and opto-electronical measurement anchor point precision in the measurement system was also calculated. Under this calculation, the maximum errors of this measuring method is less than 1/4 center wave length of interferer light.
出处
《光电子．激光》
EI
CAS
CSCD
北大核心
2003年第12期1319-1323,共5页
Journal of Optoelectronics·Laser
基金
国家自然科学基金资助项目(60072023)
