摘要
介绍了SPC(统计过程控制 )技术的技术流程、应用软件和具体实施方法。详细叙述了SPC技术的核心工具控制图技术及其在微电路生产中的应用。
The technique flow, application software and particular implement measures of SPC technology are introduced in this paper. The control chart being core tool of SPC technology and its application in microcircuit manufacture are described in detail.
出处
《微电子技术》
2003年第6期55-57,共3页
Microelectronic Technology
