摘要
用能量色散X射线谱仪和电子探针,研究两种含有第二相沉淀和喷射弥散强化镍基合金的阴极溅射表面微观形貌,发现形成的溅射锥体是由于第二相沉淀和氧化物质点的存在,使局部溅射率改变和引起静电效应的结果。
Glow discharge cathodic sputtering of alloys containing second phase precipitatesor injection of oxide particles has been observed with an energy dispersive X-ray spectrometerand scanning electron microprobe. It was shown that the formation of cones during thesputtering in these alloys is due to masking of the matrix by glow sputtering second phaseprecipitates or oxide particles. At steady state, the number density was lound to be a functionof precipitate or oxide particle density in bulk alloys. In addition to local sputtering rate changes,the electrostate effect ?ay play a role in the formation of cones.
出处
《金属学报》
SCIE
EI
CAS
CSCD
北大核心
1989年第4期B288-B292,共5页
Acta Metallurgica Sinica
关键词
镍基合金
辉光放电
阴极溅射
glow discharge
cathodic sputtering
nickel base alloy
