摘要
随着深紫外光刻技术的发展,透光范围宽、透过率高的CaF_2晶体成了人们关注的焦点,其尺寸和质量得到了不断的提高。结合CaF_2的基本性质,综述了CaF_2晶体的主要生长方法及存在的问题。从原料的纯化处理到晶体的光学加工,归纳总结了提高紫外级CaF_2晶体的尺寸、质量和产率的有效措施。
CaF2 crystal with broad wavelength range and high transmittance has become the focus of the semiconductor industry with the development of UV-lithography. Therefore, the size and quality of CaF2 crystal have gained continuous enhancement. Combined with the fundamental properties of CaF2, the main CaF2 crystal growth methods and existing problems were summarized. Those effective ways of improving the size, quality and rate of production of UV-graded CaF2 crystal were introduced from the purification of raw materials to the surface finish of crystal.
出处
《人工晶体学报》
EI
CAS
CSCD
北大核心
2003年第5期476-482,共7页
Journal of Synthetic Crystals
