摘要
采用高功率和高频率准分子激光器在高真空及 H2 和 N2 气氛下沉积类金刚石膜 .利用 Raman光谱和电子衍射方法分析了膜的微结构 . Raman光谱呈典型 DLC膜的特征 ,G峰位于 1 5 2 8cm-1,D峰位于1 3 2 7cm-1,为一大的肩峰 ,电子衍射图象呈多晶电子衍射特征 ,可观察到 5个同心圆环 ,由此计算出的面间距与金刚石 ( 1 1 1 ) ,( 2 0 0 ) ,( 2 2 0 ) ,( 3 3 1 )和 ( 3 3 2 )面间距相符 .红外吸收光谱测量结果表明 ,在 Ge片上单面镀类金刚石膜具有明显的红外增透效果 ,在 1 0 0 0～ 3 0 0 0 cm-1范围内红外透过率达到 5 5 %以上 .用原子力显微镜和 SEM观察了表面形貌 ,用显微硬度计和显微划痕仪测试了膜的硬度与附着力 .
Diamond-like films have been prepared by using high power and high frequency excimer laser under a high vacuum, H 2 and N 2 gas environment respectively. The structure of the films was studied by Raman spectrum and electron diffraction method. The measurement results of Raman spectroscopy show a typical characteristic of that DLC films with G peak at about 1 528 cm -1, and a shoulder shape D peak at 1 327 cm -1. The electron-diffraction pattern has a polycrystalline electron diffraction feature, five diffraction rings were observed. The lattice spacing calculated from these rings is in agreement with that of cubic diamond. Diamond-like films on Ge substrate possess antireflectance property in infrared. Morphology of the films were observed by AFM and SEM, hardness and adhesion of the films are 1 621 kg/mm\+2 and 2\^2 GPa, respectively.
出处
《高等学校化学学报》
SCIE
EI
CAS
CSCD
北大核心
2003年第11期2048-2050,共3页
Chemical Journal of Chinese Universities
基金
国家"八六三"新材料领域 Z3 8-0 2项目 (批准号 :2 0 0 2 A A3 2 5 0 90 )资助
