摘要
The hydrogenated diamond like carbon(DLC) films were formed on conductive glass substrate by deposition in DMF using a pulse modulated source. The X ray photoelectron spectroscopy results of the films showed that the main composition of the films are carbon. The Raman and IR spectra indicated the existence of hydrogen in form of sp 3 C in the film. From the Raman spectra indicated the formation of DLC in most regions of the film and also possible diamond deposits. The films showed high transmission ratio (>70%) in 330～2000 nm and electrical resistivity of 10 10 Ω·cm.
The hydrogenated diamond like carbon(DLC) films were formed on conductive glass substrate by deposition in DMF using a pulse modulated source. The X ray photoelectron spectroscopy results of the films showed that the main composition of the films are carbon. The Raman and IR spectra indicated the existence of hydrogen in form of sp 3 C in the film. From the Raman spectra indicated the formation of DLC in most regions of the film and also possible diamond deposits. The films showed high transmission ratio (>70%) in 330～2000 nm and electrical resistivity of 10 10 Ω·cm.
出处
《应用化学》
CAS
CSCD
北大核心
1999年第4期80-82,共3页
Chinese Journal of Applied Chemistry
基金
国家自然科学基金
关键词
类金刚石膜
液相沉积法
制备
DMF溶液
diamond like carbon film,formation,liquid phase deposition,spectra characterization
