摘要
阐述了分裂频率约为100kHz的横向塞曼效应激光器及以其为光源的分辨率为10nm的动态式外差干涉仪。仪器应用了国产锁相环器件,采用了专门设计的前馈控制器,使其锁定范围从±15％扩展到±40％,满足了仪器的技术要求。仪器填补了国内高分辨位移动态测量仪的空白。
This paper presents a high-resolution heterodyne interferometer. It applied a frequency stabilized transverse zeeman laser, whose frequency difference is 100 KHz. The measurement resolution of instrument is 10 nm. The instrument applied phase-lock multiple frequency technic by a phase-lock IC made in China. A new fore-feed unit is applied in circuit, thereby the phase-lock range is widened from ±15% to ±40%. As a result the instrument can be applied to dynamic displacement measurement. The instrument is made first of all in China.
关键词
干涉仪
锁相倍频
激光器
高分辨率
Phase-lock multiple frequency, high-resolution, heterodyne interferometer, Transverse zeeman laser
