摘要
全息光栅拍频精密测量仪是集稳频激光器、全息光栅、光拍频技术与计算机技术于一体的一种新型精密测量仪器。它具有双频激光干涉测量和光栅测量的优点。本文阐述了该仪器的工作原理、主要结构及误差分析，并给出了测试对比结果。
Precision measuring instrument with holographic gnating beat frequency is a new devicewhich combines laser frequency, holographic grating, the technique of optical beat frequency and comPuter. The instrument has the advantage of double frequency laser interferoment and grating measurement. Its operating principle, main constitution and error analysis are introduced and the measuringcompare results are given in the poper.
出处
《西安理工大学学报》
CAS
1995年第1期22-27,共6页
Journal of Xi'an University of Technology
关键词
全息光栅
线偏振光
锁相倍频
精密测量仪
holographic grating
linearly polarized light
phase-lock multiple frequency
