摘要
文中介绍了光学轮廓仪的测量原理及其误差分析。提出了一种干涉相位差与检偏器方位角成线性关系的微分干涉显微镜．应用相移干涉技术，实现了对表面轮廓的高精度测量。由于采用了共光路干涉体系，仪器对机械振动等外界干扰不敏感，在一般场合下测量精度可优于 １ｎｍ。
The principles and error analysis of an optical profiler are described in this paper. A differential interference microscope was developed. The phase difference between two interfering beams in the microscope is linear with the azimuth angle of analyzer. High precision measurement of surface profile was achieved by using PSI (phase shifting interferometry). Adopting a commonpath interfering scheme, the instrument, is insensitive to vibration and can operate with an accuracy better than 1mm in an orbinary laboratory environment.
出处
《清华大学学报（自然科学版）》
EI
CAS
CSCD
北大核心
1992年第2期42-48,共7页
Journal of Tsinghua University(Science and Technology)
关键词
表面轮廓
误差
光学轮廓仪
surface profile, surface roughness, precision measurement, surface metrology
