摘要
采用磁悬浮技术把运动部件悬浮在运行导轨之上,利用直线电机无接触驱动运动部件,从而实现机构的进给运动,该运动无摩擦和磨损,是一个无阻尼系统。选用合理的增益系数后,运用PID控制技术可对机构的进给运动进行精确的控制。仿真结果与精度分析表明,磁悬浮无阻尼结构有利于改善进给机构的位移输出动态性能,提高运动控制精度,控制精度误差不大于0.6μm或0.2μm。
A moving assembly is suspended on a rail by applying magnetic levitation(Maglev) technology and it is driven noncontacted by a linear motor. The feeding mechanism is a nondamping system because of avoiding friction and wearing. After debugging the coefficients of P,I and D, the dynamical control of the feeding movement with PID controller is accurate. The simulation results and accuracy analysis show that the maglev structure with nondamping is benefit to improve dynamical performance to the displacement output of the feeding mechanism. The control accuracy is less than 0.6 μm or 0.2 μm that is higher than the common damping mechanism.
出处
《微细加工技术》
2003年第3期62-65,共4页
Microfabrication Technology
基金
吉林省自然科学基金资助项目(20020621)
中国科学院研究生科学与社会实践资助专项创新研究类项目
关键词
磁悬浮
进给机构
PID控制
直线电机
无阻尼系统
magnetic levitation(maglev)
feeding mechanism
linear motor
PID control
simulation
