摘要
根据磁悬浮轴承无直接接触摩擦与磨损的特点,设计了一种精密移动平台。移动平台在直线电机的无接触驱动和Proportional Integral Differential(简称PID)控制器的控制下,沿轴杆进行无接触摩擦阻尼的直线运动及精确定位。仿真试验结果证明,磁悬浮无阻尼结构有利于改善平台的位移输出动态性能以及提高运动控制精度;改变直线电机的性能参数及移动平台的固有振荡频率等,均可以改变平台位移输出的动态性能。精度分析表明,应用PID控制技术,控制系统本身引起的位移误差小于0.01μm,可实现0.5μm或0.1μm的位移控制精度。
A new kind of moving platform supported by magnetic bearing without contact friction and wearness directly is presented in this paper. Driven non-contacted by a linear motor and controlled by PID(Proportional-Integral-Differential)controller,the moving platform can move straightly without contact damping alone the axostyles and position accurately. The results of simulation experiments testify that applying the magnetic bearing structure without contact damping is benefit to improve dynamical performances to the displacement output of the moving platform.In the same time,the dynamical performances of the moving platform will vary if changing the performance parameters of the linear motor and the natural oscillation frequency of the platform.After accuracy analyzing,it shows the displacement error caused by the PID controller is less than 0.01 μm.So the measure error of the real time measure system constitutes mainly the displacement error of the moving platform.The moving control attainable precisions of the platform are 0.5μm or 0.1μm finally.
出处
《机械设计与研究》
CSCD
2004年第5期47-49,共3页
Machine Design And Research
基金
吉林省自然科学基金资助项目(20020621)
关键词
磁悬浮轴承
移动平台
无接触驱动
PID控制
仿真
magnetic bearing
moving platform non-contact drive
Proportional-Integral-Differential(PID)control
simulation
