摘要
作者住Bernex公司计算机控制的CVD设备上制备了TiC-TiN多层涂层与TiC及TiN单层涂层,利用自制的MT-1型真空摩擦磨损试验机系统地考察了三者的摩擦磨损性能,并对磨痕进行了扫描电镜显微观察和X-射线能谱成分分析。结果表明,无论是在真空中还是在大气中,也无沦是在于摩擦还是在油润滑条件下,TiC—TiN多层涂层均具有较好的摩擦学性能。文章还根据这种涂层所特有的多层磨损机制和过渡层润滑机制,对其良好的摩擦磨损性能进行了解释。
A series of vacuum sliding experiments was carried out to compare the tribological properties of CVD TiC-TiN multilayer coating with TiC, TiN single coatings. These CVD coatings were made on a computer-controlled equipment of the Bernex Corporation. The friction and wear tests were carried out on an MT-1 model vacuum friction and wear testing machine with a ball-on-disc specimen contact geometry. The coated ball, the steel ball, the coated disc and the steel disc were adopted. The properties of friction and wear for these rubbing pairs were compared, including the friction coefficient μ and the wear rate of ball volume △W.The results shown that the properties of TiC-TiN multilayer coating are better than those of single coatings (TiC, TiN) and both of them are much better than those of the uncoated steel ball in vacuum or air and under drv friction or oil lubrication condition. Scanning electron microscopy (SEM) and energy dispersive spectroscopy (EDS) analyses proved that there is no adhesive wear at all on the coated surface. The multilayer structure makes the coating to have excellent tribological properties. To explain this phenomenon, a multilayer wear mechanism and transition layer lubrication mechanism for the multilayer coating was proposed. Under the given experimental conditions, wear of the coating can be divided into three stages: (1) Voids and crack nuclei form in the early stage; (2) The coating is pressed up to initiate cracks as a result of plastic deformation of the substrate below the coating, the cracks then propagate under stress and/or heat stress and other influences; (3) The coating breaks up in severe wear, and is norn out slowly sheet by sheet in mild wear, depending on the experimental conditions. The main difference occurs at the stage (2) of the wear process for these three kinds of coatings. The cracks in the TiC-TiN multilayer coating cannot always propagate in the given direction because there are no columnar crystals in it and the grains in it are finer than those of the single coating (TiC or TiN). The morphologies of transition layers for the three coatings are also very different. There are uniform and regular morphology of round voids in TiC-TiN coating, so that this coating has better lubrication property compared with TiC and TiN coatings.
It is concluded that after further investigations this new CVD TiC-TiN multilayer coating will be used in a range of tribological applications.
出处
《摩擦学学报》
EI
CAS
CSCD
北大核心
1992年第2期131-143,共13页
Tribology
基金
清华大学摩擦学国家重点实验室基金
关键词
CVD
磨损
摩擦学
性能
多层涂层
chemical vapor deposition, TiC-TiN multilayer coating, multilayer wear, vacuum, tribological property
