摘要
主要叙述了采用计算机控制电子器件性能综合测试台的气压,采用专门设计制造的伺服电动阀,通过改变伺服电动阀的开启角度达到控制气压的目的。气压的控制精度实测值为:在常温条件下的5×10-2Pa～5kPa范围内误差不大于±6.4%;在-55℃的低温条件下的0.4～5kPa范围内误差小于±5.6%,同时实现了检测台的操作、控制、数据采集和处理等方面的自动化,提高了测试数据的准确性和可重复性。
In this study,computer control was applied on the low-pressure system for examining elec-troparts properties.The pressure was automatic controlled by adjusting the opening angle of the servo el-tromotive valve which specially designed and manufactured.The precision of controlled pressure are very high:At room temperature,the error of the controlled pressure is no more than±6.4%during the pres-sure from5×10-2Pa to5×103Pa.At the low temperature of-55°C,the error of the controlled pressure is no more than±6.4%during the pressure from4×102Pa to5×103Pa.Operation and control of the ex-amining、data collection、data processing were automatic.The accuracy and repeatability of the data was increased.
出处
《电子工业专用设备》
2003年第4期62-64,共3页
Equipment for Electronic Products Manufacturing
关键词
低气压
计算机
控制
Low Pressure,Computer,Control
