摘要
主要叙述了采用计算机控制材料循环处理工艺中的低温、真空系统,采用专门设计制造的伺服电动阀,通过改变伺服电动阀的开启角度达到控制真空的目的。真空的控制精度实测值为:在常温条件下的5×10-2Pa～5×103Pa范围内误差不大于±6.4%;在-55℃的低温条件下的4×102Pa～5×103Pa范围内误差小于±5.6%。
Discusses the cyclic control process of a low-temperature/vacuum testing system by computer for various material specimens to be tested. A specially-designed electric control servo valve was puovided for the cyclic control process, on which the opening angle can be adjusted automatically so as to achieve different vacuum conditions. The accuracy measured in pressure is not higher than ±6.4% in the range from 5×10^(-2) Pa to 5×10~3 Pa at room temperature or not higher than ±5.6% in the range from 4×10~2 Pa to 5×10~3 Pa at -55℃ as low temperature.
出处
《真空》
CAS
北大核心
2004年第3期53-55,共3页
Vacuum
关键词
真空
计算机
气压控制
vacuum
computer
pressure control
