摘要
叙述了在电子器件上常用高热导率陶瓷材料的性能和应用 ,主要包括BeO ,BN ,AlN等三种陶瓷材料。特别介绍了AlN陶瓷的发展前景及其最新应用。
In this paper,we present an overview of the progress of high thermal conductivity ceramic materials,including beryllia (BeO),boron nitride (BN) and aluminum nitride (AlN) ceramic materials etc.The development prospects and application of AlN ceramic material are introduced with emphasis.
出处
《真空电子技术》
2003年第2期49-53,共5页
Vacuum Electronics
关键词
氮化硼
氮化铝
高热导率
Boron nitride
Aluminum nitride
High thermal conductivity
