摘要
本文介绍一种新的迭代法和条件优化方法,用于单层非吸收膜和吸收膜的光学常数的精确测定。一般方法中的多解问题在这里被很好地抑制和消除。文中给出一些介质膜和金属膜的测定实例,其多角度入射下的反射率和透射率值都是在DF 透反仪上测量得到的。
A new iteration and conditional optimization method for calculating the optical constants of nonabsorbing and absorbing single- film,based on the measuring the reflectance and transmittance at dif- ferent incident angles,is given out.The problem of multiple solution which often happens in other method is well eliminated.The measuring results of several dielectric and metal thin films are given,and the reflectances and transmittance are measured by DFTR-meter.
出处
《激光技术》
CAS
CSCD
1992年第5期268-274,共7页
Laser Technology
