摘要
在机械学领域中,类金刚石碳膜的应用尚需解决的问题之一是膜与衬底的附着性和膜厚,两者往不能统一。为此,我们采用了间歇式沉积法。实验表明,间歇式沉积可大大增加膜厚而不影响膜与衬底的附着性。
Useful applications of diamond-like carbon films are sometimes complicated by adhesion problems, partly owing to the large internal compressive stresses in the films. Therefore, it is very important to find ways to reduce these stresses which limit the thickness of the grown films. In the present paper an intermittent method for deposition of diamond-like carbon films is employed. The experimental results show that the thickness of the deposited films is greatly increased but the adhesive strength between the films and the substrate is not influenced. The reason is that the intrinsic stresses in diamondlike carbon films relax to a certain degree during intermittent period.
出处
《机械工程材料》
CAS
CSCD
1992年第5期29-31,共3页
Materials For Mechanical Engineering
