摘要
报道了用射频等离子体化学气相沉积方法制备非晶态碳膜的实验结果。在适当的沉积条件下,该膜非常硬。它具有许多接近于金刚石的令人感兴趣的性能。最后对对非晶态碳膜的应用前景进行了讨论。
In this paper the experimental resttIts for the amorphous carbon film produced by γf plasma enhanced CVD are reported. If made under appropriate deposition conditions the film are extremely hard. It possesses interesting properties approximate to those of diamond. Finally, the applications of the amorphous carbon film are discussed.
出处
《机械工程材料》
CAS
CSCD
1990年第4期40-42,52,共4页
Materials For Mechanical Engineering
