摘要
以硅基光电集成回路为主线,综述了不同的硅基光波导材料的制备技术和硅基光波导的制作工艺及其对光传输损耗的影响。分析了硅基光波导与锗硅光探测器集成用两种不同的耦合方式,阐明了波导与探测器集成的机理及设计理论基础。归纳出硅基键合激光器的四种技术方案,指出其共同优点是克服材料异质外延引起的晶格失配和热膨胀非共容,对实现OEIC行之有效。
In this paper different silicon-based materials of optical waveguide and its loss characteristics are introduced,with focus on silicon-based optic electronics integrated circuit (OEIC). Two methods of coupling photodetector to waveguide are analyzed,and the principle of integration of silicon-based optical waveguide and silicon germanium photodetector is outlined. Methods of lasers bonded on silicon substrates are discussed and its advantages are pointed out.
出处
《材料导报》
EI
CAS
CSCD
2003年第5期31-35,共5页
Materials Reports
基金
国家863计划
高校博士点基金(200220006037)
北京航空航天大学博士生基础性研究基金
