摘要
采用原位红外测试技术,在线观测了化学气相淀积反应器内TiCl<sub>4</sub>的均相氧化反应。捕获了两种重要活性中间体TiCl<sub>3</sub>和TiOCl<sub>2</sub>,从而导出该反应的机理模型。并采用尾气红外定量分析方法得到了TiCl<sub>4</sub>氧化反应的动力学方程及反应活化能。反应活化能:66.8 kJ/mol,指前因子:2.45×10<sup>2</sup>/s。
In situ FTIR method was successfully used to observe the homogenous reaction on line in CVD reactor. Two important active intermediates TiOCl_2, TiCl_3 were observed. A more creditable kinetic mechanism was obtained based on these experimental data. The oxidation rate of TiCl_4 vapor was measured by FTIR quantitative analysis. The apparent activation energy for the reaction is 66.8kJ/mol.
基金
国家自然科学基金
关键词
四氟化钛
二氧化钛
化学气相淀积
kinetics
titanium tetrachloride
titanium dioxide
intermediate
chemical vapor deposition
