摘要
综述了各种无机薄膜的基本制备方法 ,并对目前国内外的一些新的薄膜制备方法和应用的最新进展进行了概述 ,分别介绍了物理方法、化学方法及溶胶 凝胶法 (Sol gel)的基本特点及成膜特性 。
Basic preparation methods of different inorganic films were discussed in this paper.Some new met-hods for preparing films and the latest devolopment both at home and abroad were described.The main characteristics of film forming and physical vapor deposition method(PVD),chemical vapor deposition method(CVD) and sol-gel meghod were introduced.The prospect in the field of preparing the films was predicted at the same time .
出处
《硅酸盐通报》
CAS
CSCD
2003年第2期21-25,56,共6页
Bulletin of the Chinese Ceramic Society
基金
国家自然科学基金资助项目 ( 5 9995 5 2 6)
