摘要
利用溶胶-凝胶法研制了 SiO_2 薄膜.研究了溶液中组成,即 H_2O/Si(OC_2H_5)_4摩尔比对薄膜形成的影响.在溶液中添加了干燥控制化学剂,研究了添加剂对成膜性的影响.结果表明,利用H_2O/Si(OC_2H_5)_4的摩尔比>15,并且添加适量的添加剂的溶液,能够制得结构均匀而不开裂的 SiO_2薄膜.用扫描电镜观察了薄膜的微观结构,并测定了薄膜的厚度.
The silica films were prepared by a new Sol-gel process from tetraethylorthosilicate(TEOS)solutions.In the present study,the solutions containg different H_2O/Si(OC_2H_5)_4 molar ratioshave been prepared,and as drying control chemical additive(DCCA),appropriate amount ofglycerin was added in these solutions.Microscope slides have been spin coated in these solutions.After backing,the film thickness has been determined.The film microstructure was observedby scanning electron microscope.It was shown that the H_2O/Si(OC_2H_5)_4 molar ratio andglycerin clearly affect the film microstructure.As a result,the solutions of H_2O/Si(OC_2H_5)_4≥15 by the addition of glycerin are good for preparing uniform SiO_2 films.
出处
《无机材料学报》
SCIE
EI
CAS
CSCD
北大核心
1993年第1期125-128,共4页
Journal of Inorganic Materials
关键词
溶胶-凝胶法
薄膜
二氧化硅
Tetraethylorthosilicate
SiO_2 film
Sol-gel process
