摘要
用114keV的C^+束,在2×10^(16)ions/cm^2和1×10^(17)ions/cm^2两种剂量下对双离子束溅射淀积DLC膜(即类金刚石碳膜)进行了辐照。基片为玻璃。辐照过程中基片温度低于80℃。用红外透射光谱、Raman光谱及其拟合以及电阻率测量等手段对膜层进行了表征。结果表明,原淀积膜含有SP^3 C-C、SP^2 C-C、SP^3 C-H及SP^2 C-H等键,并且键角是无序化的。随C^+辐照,膜中SP^3 C-H键相对减少,SP^2 C-H键相对增多;同时,膜中键角无序化程度降低,结晶化程度增强,微晶在数量及尺寸上增大。这些结构上的变化导致了辐照膜层电阻率和红外透过率相对于原膜层大幅度的下降。
Diamond-like carbon films, deposited by a dual-ion beam sputtering method on glass substrates at temperature less than 50℃, were irradiated by 114 keV carbon ions with doses of 2 × 1016 ions/cm2 and 1 ×1017 ions/cm2, respectively. Raman spectroscopy, infra-red transmittance spectroscopy and electrical resistivity were used to characterize the as-deposited and the irradiated films. It was shown that the as-deposited films contain SP3C-C,SP2C-C, SP3C-Hand SP2C-H bondings with bond-angle disorder. The C+ irradiation led to decrease of SP3C-H bonds and increase of SP2C-H bonds in films. Meanwhile, the bond-angle disorder was decreased, the crystallization degree increased, and the number and/or size of microcrystals also increased due to irradiation. All these structural changes led to considerable decreases of electrical resistivity as well as infra-red transmittance of irradiated films.
出处
《核技术》
CAS
CSCD
北大核心
1992年第3期162-166,共5页
Nuclear Techniques
关键词
碳
结构表征
DLC膜
辐照
DLC films C+ irradiation Structural characterization
