摘要
用双离子束溅射法在５０℃以下的基底上淀积了类金刚石（ＤＬＣ）膜。对ＤＬＣ膜采用扫描电子显微镜、透射电子显微镜及拉曼谱仪进行了结构分析。通过对扫描电子显微镜观察，发现在ＤＬＣ膜中存在金刚石微晶。通过透射电子显微镜分析，确定金刚石微晶具有面心立方结构，计算出的晶格常数与标准值基本相同。通过拉曼光谱分析后，进一步验证了薄膜中金刚石微晶的存在并得出了膜中ＳＰ３Ｃ－Ｃ键所占的比例。
Diamond like carbon films were deposited onto substrates at 50℃ by dual ion beam sputtering method.DLC films were studied by making use of SEM(Scaning Electron Microscope),TED(Transmission Electron Diffraction) and Raman Spectra.Cubic diamond microcrystal was shown on SEM photograph.Diamond microcrystal has the structure of FCC(faced centered cubic). Through TED analysis,the calculated value of lattice constant was nearly consistant with the standard value.It was further proved by Raman Spectra analysis that diamond microcrystal was existent. The proportion of SP 3C-C bond in DLC films was also defined.
出处
《西南交通大学学报》
EI
CSCD
北大核心
1997年第1期6-10,共5页
Journal of Southwest Jiaotong University
关键词
结构分析
类金刚石膜
双离子束溅射法
dual ion sputtering deposition
DLC films
structure analysis
