摘要
主要概述了用MOCVD法制备金属铱涂层的原理以及工艺参数对制备涂层的影响,并对铱做保护层的铱/铼喷管的寿命进行了预测。指出MOCVD法制备铱涂层的关键问题是沉积前驱体的选择、沉积工艺参数的优化,并对MOCVD法制备铱涂层的最新研究进展作了评述,指出了今后的研究发展方向。
The indium coating as high temperature oxidation-resistant materials are used widely in aeronautics, astronauts and marine fields. The principle and preparation of iridium coating by MOCVD have been reviewed and the factors affecting the quality of iridium coatings and the service time of iridium coated rhenium thruster have been introduced. The latest progress, current difficulties (selection of precursors, optimization of factors for MOCVD, etc.) and developing trend in these fields have also been described.
出处
《宇航材料工艺》
CAS
CSCD
北大核心
2003年第2期1-3,9,共4页
Aerospace Materials & Technology
基金
航空资助项目:00 G53 066
