摘要
众所周知，ＭＯＣＶＤ方法是制备薄膜材料的重要方法之一，现已广泛应用于半导体薄膜、铁电薄膜和超导薄膜等的制备。在以前的工作中，我们设计、加工、安装、调试、建立了一套可计算机自动控制的热壁低压ＭＯＣＶＤ设备，制备出了ＴｉＯ２纳米粉末，得到了一些初步结果。本文详细研究了热壁低压ＭＯＣＶＤ方法在ＴｉＯ２纳米粉末制备中的应用，通过合理设计反应室和收集区域，在采用反应区域和收集区域之间无任何过渡区域的收集方式，制备出了ＴｉＯ２纳米粉末。采用Ｘ射线衍射技术研究了沉积温度对ＴｉＯ２纳米粉末的晶体结构和平均晶粒尺寸的影响规律。在５００℃～１０００℃范围内，粉末均为锐钛矿结构，平均晶粒尺寸７．４～１５．２ｎｍ ，７００℃条件下制备的ＴｉＯ２纳米粉末的平均晶粒尺寸最小。透射电子显微镜观察表明，在最佳沉积温度７００℃条件下制备的ＴｉＯ２粉末粒度均匀性好，粒径约为５～８ｎｍ 。
MOCVD technolgy is one of most timportant methods in the preparation of thin films, such as semiconductors, ferroelectrics and superconductors. In our previous work, a computer controlled MOCVD apparatus was designed and built and titanium dioxide nano powders were prepared. In this paper, we used a new powder collection method to collect titanium dioxide nano powders. X ray diffraction and TEM were employed to study the effect of temperature on the grain sixze of titanium dioxide nano powders. It was found that the size of the powders prepared at 700℃ was uniform and about 5 to 8 nanometers. The optimal temperature was 700℃.\;
出处
《材料科学与工程》
CSCD
1999年第4期7-9,6,共4页
Materials Science and Engineering
