摘要
TiO2薄膜具有良好的电学性能,优异的光学性能,化学稳定性高,机械强度高,长期以来受到人们的关注,已经广泛应用在电子、光学、医学等方面。本文简单介绍了TiO2薄膜的制备方法及应用。
The TiO2 thin film has good electrical properties, perfect optical properties, high chemical resistibility and high mechanical strength. So it has been paid attention to for long time and used in many fields which include electronic, optical and medical fields. This paper simply introduces preparation methods and applications of TiO2 thin films.
出处
《真空》
CAS
北大核心
2003年第2期19-22,共4页
Vacuum
关键词
TIO2
薄膜
光催化
制备方法
应用
TiO_2 thin films
photocatalysis
preparation methods
applications
