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氧流量对TiO_2薄膜光电性质的影响

Influence of Oxygen Flux on Photoelectric Properties of TiO_2 Thin Film Prepared by DC Magnetron Sputtering
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摘要 采用直流反应磁控溅射法在FTO基底上制备了TiO2薄膜,研究了在不同氧流量条件下TiO2薄膜的拉曼光谱、表面形貌和透射光谱,并将TiO2薄膜用N719染料进行敏化,制备了染料敏化太阳电池,测试了电池的I-V特性曲线。实验结果表明:随着氧流量的增加,电池的短路电流和光电转换效率先增加而后降低,在15cm3时达到最大;薄膜为锐钛矿和金红石的混合晶体结构;氧流量对薄膜的表面形貌影响不大,薄膜都表现出疏松多孔的表面结构。 TiO2 thin films were deposited on FTO substrates by DC reactive magnetron sputtering at different surface morphology and oxygen fluxes. The films were characterized by Raman spectroscopy, transmission spectra. I-V curve was tested for the dyesensitized solar cells which were prepared with TiO2 films sensitized by N719. The results show that with the increase of oxygen flux, the short-circuit photocurrent and the solar energy conversion efficiency (η) increase at first, but then decrease. And when the oxygen flux is 15 cma, both Jsc and η reaches a maximum. It is revealed that the TiO2 thin films are the mixed phase of anatase and rutile, oxygen flux has little effect on the surface morphology and all films show loose and poriferous structure.
出处 《半导体光电》 CAS CSCD 北大核心 2010年第1期83-86,89,共5页 Semiconductor Optoelectronics
基金 湖南省自然科学基金项目(07JJ3010)
关键词 氧流量 TIO2薄膜 直流反应磁控溅射 染料敏化 太阳电池 oxygen flux . TiOz thin film DC magnetron sputtering dye-sensitized solar cell
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