摘要
讨论各种掺杂剂在MOS气体传感器中的作用,并详细介绍SnO_2气体传感器中的掺杂剂。
The characteristics of MOS gas sensors are closely related to the doping. It plays a very important role in MOS gas sensors. The kinds of doping agents and their influences in MOS gas sensors, especially in SnO_2 gas sensor, were discussed.
出处
《贵金属》
CAS
CSCD
北大核心
1992年第3期63-72,共10页
Precious Metals
关键词
半导体传感器
气体探测器
掺杂
进展
Semiconductor sensor
Gas detectors
Doping
Advancement
