摘要
在窄带滤波器件的研制过程中 ,模拟分析了采用极值法对膜层厚度进行光学监控及其偏差对滤波器件光学特性的影响 ,并给出了一个 4腔DWDM滤波片的理想工艺曲线以及模拟计算所得到光学特性的分布曲线 ,计算结果有利于指导高品质薄膜器件的研制 ,并研制出符合工业应用标准要求 3腔和 4腔的 10 0GHz、2 0 0GHz的DWDM滤波片以及CWDM滤波片 .
The simulation study of the filters optical character affected by the In-situ optical monitoring the layer thickness and its deviation during deposition process for the optical narrow band-pass filter thin film was reported. Both of the ideal monitor trace and the simulation of optical parameters distributing curve of the 4-cavity DWDM filter were given. The simulation results are very useful in the practice of high quality optical filter thin film deposition. The filters are designed to meet specific 100GHz, 200GHz DWDM and CWDM bandwidth requirements, and the three and four cavity narrow band-pass filters are produced for the industry application.
出处
《红外与毫米波学报》
SCIE
EI
CAS
CSCD
北大核心
2003年第1期56-58,共3页
Journal of Infrared and Millimeter Waves
基金
上海应用物理研究中心 (批准号 0 0JC14 0 2 9)
复旦大学 (批准号EX12 35 7)资助项目~~
