摘要
提出了一种计算机自动判读极值点的方法 .利用此方法可以在光学薄膜厚度监控过程中 ,实现计算机对规整λ/4膜系膜层厚度的自动监控 .此方法具有监控精度高。
A method for auto judge the point of limit value in computer was presented in this paper.By using this method,auto monitoring control for quarter film system thin film thickness can be achieved at the process of the monitoring control of optical thin film thickness.This method has advantages of high precision and high steadiness.
出处
《西安工业学院学报》
2001年第2期105-109,共5页
Journal of Xi'an Institute of Technology
