摘要
提出了一种多层１／４波长膜系的薄膜厚度监控方法．利用这种方法可以在监控过程的同时得到膜层的光学常数且具有监控精度高的优点．
A film thickness monitoring control method for quarter films was presented in this paper.By using this method,the optical constant of layer can be determined at the same process.This method can also be used to monitor the unquarter films according to the measurement of the films reflectivity,and it has advantage of improving accuracy,increasing productivity and improving the film product quality.
出处
《西安工业学院学报》
1999年第2期87-90,共4页
Journal of Xi'an Institute of Technology
基金
兵器工业科研基金
关键词
监控
薄膜
厚度
光学常数
光学薄膜
monitoring control
thin film thickness
optical constants
