摘要
在微分干涉相衬显微镜中加入偏振相移装置,实现了对干涉光强的调制,达到了相移的目的,构造了具有纳米级分辨率的相移干涉显微测量系统。编制了一套测试软件及多组数据处理软件,将测量系统的各组成部分用软件进行了连接。分析并解决了测量过程中的技术难题,对纳米表面微观形貌进行了高精度实时自动测量。该测量系统能够准确地重构出纳米表面微观形貌,并给出了定量测量数据。
Polarization phase-shifting device is added to a differential-interference-contrast microscope. The modulation of interference light intensity and phase shifting are realized. The phase-shifting interference microscopy measurement system is constructed. A serious of measuring software, algorithms software, and data processing software are compiled. Some technical difficulties existed in the measurements are analyzed and solved. The high accuracy real time measurements of nanometer surface micromorphology are carried. The measurement system can accurately reconstruct nanometer surface micromorphology and presents experiment results.
出处
《光学技术》
EI
CAS
CSCD
2003年第1期2-4,7,共4页
Optical Technique
基金
国家自然科学基金资助(项目号:59975052)
关键词
微分干涉相衬
相移干涉显微术
纳米表面微观形貌
Computer software
Interferometers
Measurements
Morphology
Phase shift
Surfaces
