摘要
分析研究了白光相移干涉应用于表面形貌测量时表面形貌与干涉图像之间的关系 ,比较了两种不同光谱分布的光束的白光相移干涉特性。依据白光相移干涉中与干涉光强有关的一些特定参量与表面形貌之间的一一对应关系 ,提出了一种不直接测量相位、避开相位测量不确定性的新方法。所提方法扩大了可测深度范围 ,可用于测量面形较陡的连续表面或不连续深结构表面。
A new approach for measuring the surface profile is presented. It measures the surface profile not by measuring phase but by measuring the parameters, which is relative to the white light phase shifting interferometric intensity and monotonic function of the depth of the tested surface in the given measurement range. Advantage of the approach is that the depth measurement range is expanded very much, it can be used to measure the profile of the deep or discontinuous surface.
出处
《光学学报》
EI
CAS
CSCD
北大核心
2000年第8期1065-1071,共7页
Acta Optica Sinica
关键词
相移干涉
表面形貌
测量
白光
干涉法
phase shifting interferometry, surface profile, measurement.
