8HWANG W J, SHIN K S, ROH J H, et al. Development of micro-heaters with optimized temperature compensation design for gas sensors [J]. Sensors, 2011, 11(3): 2580-2591.
9WANG J, ZHANG P, QI J Q, et al. Silicon-based micro-gas sensors for detecting formaldehyde [J]. Sens Actuators B: Chem, 2009, 136(2): 399-404.
10WICHE G, BERNS A, STEFFES H, et al. Thermal analysis of silicon carbide based micro hotplates for metal oxide gas sensors [J]. Sens Actuator A: Phys, 2005, 123-124: 12-17.
