摘要
套刻精度是步进式光刻机最重要的指标之一。从应用角度探讨了Nikon系列光刻机的对准方法 。
The overlay accuracy is one of the most important specifications of the stepper. The alignment strategy of Nikon steppers is discussed from the point of view of practical application. The principles of the different marks' arrangement on the mask are described by examples.
出处
《微细加工技术》
2002年第3期44-47,51,共5页
Microfabrication Technology
