摘要
主要论述了底面对准光刻机的对准原理。
The principle of bottom side alignment,the stage structure and the selection of the shape and size of the alignment mark are discussed.
出处
《微细加工技术》
2002年第3期36-39,共4页
Microfabrication Technology
关键词
光刻机
底面对准
工件台
对准标记
lithography system
bottom side alignment
stage
alignment mark
