摘要
报道了一种基于调制输入信号频率,进行MEMS热电堆红外探测器频率响应测试的方法。与传统频率响应测试相比,对于已封装的探测器,不需要已知吸收区面积或破坏封装进行器件吸收区面积的测量,直接记录待测器件的输出电压,简化操作流程,提高测试效率。将探测器等效为一阶热—电系统,通过正弦谐波信号调制红外辐射,采集输出电压幅值,对数据归一化处理,利用线性系统理论拟合并定位-3 dB截止频率点,直接解算响应时间。实验结果表明,新方法测得的响应时间(8.38~9.52 ms)与传统响应率/频率曲线法结果(8.37~9.69 ms)高度吻合,最大偏差仅1.8%,保证测试精度,且测试器件完好,支持器件重复测试多次,为MEMS热电堆红外探测器动态性能测试开辟了新路径。
A frequency response testing method for MEMS thermopile infrared detectors based on modulating the frequency of the input signal is proposed.Compared with traditional frequency response testing methods,this approach eliminates the need to know the absorber area or damage the package for the absorber area measurement of the device in the case of packaged detectors.It directly records the output voltage of the device to be tested,which simplifies the operation process and improving test efficiency.The detector is equivalent to a first-order thermoelectrical system.Infrared radiation is modulated with a sinusoidal harmonic signal,and the output voltage amplitude is collected.The collected data is normalized.The—3 dB cut-off frequency point is fitted and located by using linear system theory,enabling the direct calculation of the response time.Experimental results demonstrate that the response times measured by the new method(8.38~9.52 ms)are highly consistent with those obtained via the traditional responsivity/frequency curve method(8.37~9.69 ms),with a maximum deviation of only 1.8%.This ensures the test accuracy,keeps the tested devices intact,and supports multiple repeated measurements of the devices.This method opens up a new pathway for dynamic performance test of MEMS thermopile infrared detectors.
作者
张震宇
卢瑾
雷程
李腾腾
李丰超
梁庭
ZHANG Zhenyu;LU Jin;LEI Cheng;LI Tengteng;LI Fengchao;LIANG Ting(National Key Laboratory of Extreme Environment Optoelectronic Dynamic Testing Technology and Instrument,North University of China,Taiyuan 030051,China)
出处
《传感器与微系统》
北大核心
2026年第2期145-149,共5页
Transducer and Microsystem Technologies
基金
国家自然科学基金资助项目(62301509,62304209)
山西省基础研究计划资助项目(202203021222079,20210302123203)
山西省重点研发计划资助项目(202302030201001)
山西省科技重大专项“揭榜挂帅”项目(202301030201003)。
关键词
MEMS红外探测器
响应时间
动态测试
幅频响应
MEMS infrared detectors
response time
dynamic testing
amplitude-frequency response
