摘要
半球谐振子在制造过程中会产生质量不平衡,对半球谐振陀螺的精度造成重要影响。因此,设计了一种振动位移测量传感器,对谐振子质量不平衡振动位移进行测量。通过对半球谐振子结构特征及质量不平衡振动特性理论分析确定了谐振子前三阶质量不平衡对支撑杆耦合振动的影响机理。利用有限元分析软件对谐振子和传感器进行模态及动力学仿真分析,选定传感器二阶弯曲振型作为敏感模态。设计搭建了传感器标定系统及谐振子振动位移测试平台。标定得到:传感器的灵敏度为10.38μV/pm,非线性误差为1.30%,谐振子振动位移实验测定误差≤2.43%。实验结果表明,该传感器能够高效并较为精准地测量出谐振子质量不平衡振动位移,为后续谐振子性能评定及制定调平工艺提供依据。
Hemispherical resonators produce mass imbalance during the manufacturing process,which has an important impact on the accuracy of hemispherical resonator gyroscopes.To solve this problem,a vibration displacement measurement sensor is designed to measure the vibration displacement when the mass of the resonator is unbalanced.Through the hemispherical resonator structural characteristics and the theoretical analysis of mass imbalance vibration characteristics of the resonator,the influence mechanism of the first three orders of mass imbalance on the support rod coupling vibration is determined.The modal and dynamic simulation analysis of the resonator and the sensor is carried out by using finite element analysis software,and the second-order bending vibration mode of the sensor is selected as the sensitive mode.The calibration system of the sensor and the vibration displacement test platform of the resonator are designed and constructed.The calibration results:the sensitivity of the sensor is 10.38μV/pm,the nonlinear error is 1.30%,and the error of the resonator vibration displacement measurement is≤2.43%.The experimental results show that the sensor can efficiently and accurately measure the mass imbalance vibration displacement of the resonator,which provides a basis for the subsequent evaluation of the resonator performance and the formulation of the leveling process.
作者
王大志
张泽田
孔令杰
梁世文
王子健
王巷钧
WANG Dazhi;ZHANG Zetian;KONG Lingjie;LIANG Shiwen;WANG Zijian;WANG Xiangjun(School of Mechanical Engineering,Dalian University of Technology,Dalian 116024,China;National Key Laboratory of High Performance Precision Manufacturing,Dalian 116024,China;Ningbo Research Institute,Dalian University of Technology,Ningbo 315000,China;School of Mechanics and Aerospace,Dalian University of Technology,Dalian 116024,China)
出处
《中国惯性技术学报》
北大核心
2025年第12期1215-1222,共8页
Journal of Chinese Inertial Technology
基金
国家自然科学基金(U24A20137)
辽宁揭榜挂帅项目(2023JH1/10400044)
中央高校基本科研业务费(DUT24RC(3)048,DUT24RC(3)048,DUT23RC(3)051)项目资助。
关键词
半球谐振子
质量不平衡
振动位移测量传感器
有限元仿真
hemispherical resonator
mass imbalance
vibration displacement measurement sensors
finite element simulation
