摘要
随着各种小口径非球面零件的广泛应用,其加工要求也日益提高。针对目前小口径非球面零件存在抛光困难、精度和一致性差等问题,提出一种适合于小口径非球面加工的斜轴磁流变抛光技术。结合该抛光技术的基本原理和加工特点,保持抛光点处的法线在加工过程中始终与抛光头轴线成45°夹角,分析和计算小口径非球面的斜轴磁流变抛光加工路径,设计一种外部为抛光旋转体,内部为固定励磁装置的斜轴磁流变抛光头,并介绍该抛光头的工作原理。利用该抛光技术对直径为6mm的碳化钨和单晶硅小口径非球面分别进行斜轴磁流变抛光试验,试验结果表明工件的表面粗糙度Ra分别由抛光前的12.1nm和10.3 nm下降到抛光后的3.7 nm和3.2 nm,从而验证该加工技术对小口径非球面进行超精密抛光的可行性。
With the widespread application of different kinds of small aspherical components,the requirements of their processing technology are also growing highly.However,the polishing for small aspherical surface is still difficult,accuracy and consistency are also poor.A new kind of inclined axis magnetorheological finishing technology is proposed for machining small aspherical surface.Its basic machining principle and characteristic is presented,the angle between the normal line of polishing point and the axial line of polishing head is kept on the constant 45° in the polishing process,and its machining paths are analyzed and calculated.A new inclined axis magnetorheological polishing head is designed,the rotating shell is in outside and the fixed excitation equipment is in inside,and the basic machining principle of polishing head is introduced.Polishing experiments for the small tungsten carbide and monocrystalline silicon aspherical surface with diameter 6 mm are adopted by this machining technology.The experiment results show the workpiece＇s surface roughness Ra respectively achieved from 12.1 nm and 10.3 nm before polishing to 3.7 nm and 3.2 nm after polishing,the experiment results demonstrate the feasibility of this technology to polish small aspheric surface.
出处
《机械工程学报》
EI
CAS
CSCD
北大核心
2013年第17期33-38,共6页
Journal of Mechanical Engineering
基金
国家自然科学基金(51175167
51205120)
国际科技合作专项(2012DFG70640)资助项目
关键词
小口径非球面
磁流变抛光
斜轴
碳化钨
单晶硅
Small aspherical surface Magnetorheological finishing Inclined axis Tungsten carbide Monocrystalline silicon
