摘要
采用微波等离子体化学气相沉积对兆瓦级回旋管用金刚石微波窗片进行了研制。对影响金刚石窗口性能的耐压强度、热导率、热膨胀系数、介电损耗正切等关键参数进行了表征。实验结果表明,厚度1 mm、通径92 mm的金刚石窗片可承受约0.47 MPa的压强;金刚石室温热导率达到20.1 W·cm^(-1)·℃^(-1);0.95 mm厚金刚石窗片介电损耗正切低至2.7×10^(-6)。合成了1.8 mm厚低微波损耗金刚石窗片并应用于140/105 GHz双频回旋管中,在140 GHz频率下回旋管实现了850 kW的稳定功率输出,窗片损耗约0.11%;在105 GHz频率下实现了760 kW的稳定功率输出,窗片损耗约0.15%。实验数据计算结果表明,研制的1.8 mm厚、tanδ=3.8×10^(-5)的金刚石窗片可满足1.5 MW长脉冲回旋管的应用需求。
The diamond disks for megawatt level gyrotron have been developed by microwave plasma chemical vapor deposition.Key parameters that affect the performance of diamond windows,such as compressive strength,thermal conductivity,coefficient of thermal expansion and dielectric loss tangent were characterized.The diamond disk with a diameter of 92 mm and a thickness of 1 mm can withstand a pressure of about 0.47 MPa.The thermal conductivity of diamond disk at room temperature reaches 20.1 W·cm^(-1)·℃^(-1).The tanδ of 0.95 mm thick diamond disk is as low as 2.7×10^(-6).Finally,a low-microwave-loss diamond disk with a thickness of 1.8 mm was synthesized under optimized parameters and applied to a 140/105 GHz dual frequency gyrotron.A stable power output of 850 kW was achieved at 140 GHz with a window loss of approximately 0.11% and 760 kW was achieved at 105 GHz with loss of approximately 0.15%.The calculation results indicate that this 1.8mm diamond disk with tanδ=3.8×10^(-5) can be used for 1.5 MW long pulse gyrotron.
作者
李义锋
姜龙
安晓明
葛新岗
张雅淋
仝婷婷
张平伟
刘晓晨
唐伟忠
郭辉
孙振路
LI Yi-feng;JIANG Long;AN Xiao-ming;GE Xin-gang;ZHANG Ya-lin;Tong Ting-ting;ZHANG Ping-wei;LIU Xiao-chen;Tang Wei-zhong;GUO Hui;SUN Zhen-lu(Hebei Plasma Diamond Technology Co.,Ltd.,Shijiazhuang 050081;Hebei Institute of Laser Co.,Ltd.,Shijiazhuang 050081;Hebei Key Laboratory of Chemical Vapor Deposition Diamond,Shijiazhuang 050081)
出处
《核聚变与等离子体物理》
北大核心
2025年第4期388-395,共8页
Nuclear Fusion and Plasma Physics
基金
国家磁约束核聚变能发展研究专项资助(2019YFE03100300)
河北省科学院高层次人才培养与资助项目(2023G22)。
关键词
MPCVD
兆瓦级微波窗口
金刚石窗片
长脉冲大功率回旋管
Microwave plasma chemical vapor deposition
Megawatt level microwave window
Diamond disk
Long pulse high-power gyrotron
