摘要
综述了含氟二胺、含氟二酐以及不同类型含氟光敏聚酰亚胺(FPSPI)的合成、光化学反应、表征及光敏特性方面的最新研究进展。负性FPSPI因热稳定性高成为研究重点,而正性FPSPI虽合成复杂,但在提升图案分辨率等方面展现出巨大潜力。探讨了FPSPI在研究与应用中的现状与前景。
The latest research progress on the photochemical reaction synthesis,characterization,and photosensitive properties of fluorinated diamines,fluorinated dianhydride,and different types of fluorinated photosensitive polyimides(FPSPI)was reviewed.Negative FPSPI has become a research focus duo to its high thermal stability.Although the synthesis of positive FPSPI is complex,it shows great potential in improving pattern resolution and other aspects.The current status and prospects of FPSPI in research and applications was explored.
作者
辛会芬
陈晨
冯柏成
Xin Huifen;Chen Chen;Feng Baicheng(College of Chemical Engineering,Qingdao University of Science and Technology,Qingdao 266045,Shadong,China;Qingdao Bochuan Teju Technology Co.,LTD.,Qingdao 266045,Shandong,China)
出处
《精细石油化工》
2025年第5期71-74,共4页
Speciality Petrochemicals
基金
山东省科技型中小企业创新能力提升工程项目(2022TSGC2595)。
关键词
含氟光敏
聚酰亚胺
二酐
二胺
fluorinated photosensitive sensitive polyimides
polyimide
dimine
dihydride
